Time of Flight Secondary Ion Mass Spectrometry (TOF-SIMS)

1.Time of Flight Secondary Ion Mass Spectrometry

Time of Flight Secondary Ion Mass Spectrometry (TOF-SIMS)is a kind of sensitive surface analysis technic whichuse primary ion to motivate a trace of secondary ionout surface. For the reason of the secondary ion with different mass need different time to reach the detector, so the mass of ions can be measured, TOF-SIMS has a high distinguishability and detective limit. TOF-SIMS is able to gain the structure information of element and molecule in surface, film, interface, even to three-dimensional samples. D-SIMS has many characteristics, for example, the secondary ion is from single layer atom (＜1nm), with only the information of surface, small analysis area, shallow analysis depth, high detective limit, it is used widely in Physics, chemistry, microelectronics, biological, pharmaceutical, space analysis or research and so on.

2.What can TOF-SIMS do for clients in product quality?

(1)When the product surface has tiny foreign body, and regular component testing method can't reach accurate qualitative and quantitative analysis to the foreign body, we can choose TOF-SIMS. TOF-SIMS can analyse foreign body composition of ≥10 um in diameter.

(2)When the product surface film is too thin to use normal test for thickness measurement, we can choose D-DIMS to analyse the film component qualitatively.

(3)When there is some foreign body on surface, and it can’t be confirmed species, we can sue TOF-SIMS, not only can analyse its element, but also molecule, even if organism molecule.

(4)When film separate from base material, but foreign body can’t be observed obviously, D-SIMS can be used to analyse material composition and make sure whether there is pollutant on the section.Detective limit even can reach ppm level.

3.Announcement in TOF-SIMS

(1)Samples size 1×1×0.5cm, too big samples are unacceptable and the surface must be smoothly.

(2)Avoid the contact of hands and tools with position which need to be tested, the samples should be put into vacuum package or separate with external environment to avoid polluting.

(3)There is no limitation in electrical conductivity, even insulating samples is acceptable.

(4)Element analysis scope H-U, detective limit is ppm level.

4.Applications sample

Sample information: a copper foil with passivation coating of organism which is used to protect the foil, customer wants to know the combination between the copper surface and benzimidazole.

Conclusion:

Both positive and negative ionic spectrum in molecular ion peaks of the mass number 415 and 416 were detected, benzimidazole (code P2) mass number is 175, so the combination mode was inferred to P2-Cu-P2.