Inorganic Foreign Body Analysis

Organic Foreign Body Analysis	Inorganic Foreign Body Analysis
Unknown Foreign Body Analysis	Product Anomaly Comparative Analysis

Inorganic foreign body analysis is a kind of analysis method aiming at the inorganic foreign body surface of the product, according to the form, the detection depth and area of the foreign body to choose a particular instrument, analyze their inorganic components and determine the elemental composition and content. Compared to foreign bodies organic and inorganic foreign body show a firmer texture and deeper color, and less light and so on. Analytical methods of inorganic foreign bodies are the following:

Analysis methods	Typical applications	Characteristics of analysis	The reference standard
Scanning electron microscope and X-ray energy spectrum SEM/EDS	surface microstructure observation; Micron grade size measurement; Micro area composition analysis; Pollutants analysis	Can quickly to do qualitative and quantitative analysis on most of the elements in the micro zone Be ~ U of sample at short analysis time	JY/T 010-1996 GB/T 17359-2012
Time-of-flight secondary ion mass spectrometry (TOF-SIMS)	The surface of the organic material and inorganic material trace analysis;	Excellent dopant and impurity detection sensitivity can detect ppm or lower concentration Depth analysis has good detection limits and Depth Resolution; Analysis of a small area	ASTM E1078-2009 ASTM E1504-2011 ASTM E1829-2009
Dynamic secondary ion mass spectrometry(D - SIMS)	Analysis of product surface tiny foreign body; Analysis of oxidation film thickness; Doping elements content determination	Small area analysis, analyze foreign body composition ≥10 μm diameter; Shallow depth analysis, measurable ≥1nm sample; High limit detection, usually ppm-ppb level	ASTM E1078-2009 ASTM E1504-2011 ASTM E1829-2009
Auger electron spectroscopy (AES)	Defect analysis; Grain size analysis; Depth profile analysis; Film composition analysis	Analysis of surface micro area can be done; Auger element can be obtained directly from the screen.	GB/T 26533-2011
X-ray photoelectron spectroscopy (XPS)	Organic materials, inorganic materials, stains, the surface of the residue analysis; Surface composition and chemical state information; Depth profile analysis	Analysis of thin layer, the analysis of elements is wide, which can analyze the surface element of 1-12 nm and the element content.	GB/T 30704-2014

Case analysis:

Case background:

A customer enlarges the product surface and finds red foreign body which affects the product performance.

Testing method:

SEM/EDS analysis

Testing standard:

JY / T 010-1996 General principle of analytical scanning electron microscopy

GB / T 17359-2012 Micro beam analysis spectroscopy quantitative analysis

Introduction of analysis methods:

1.Many red foreign body was found on the product surface through a microscope magnification, see below:

2.Testing the foreign body sample by SEM/EDS to determine the other inorganic components. After Stripping gold processing, plating the surface of sample with Pt for 30s, and then put the sample into the SEM sample room to magnify and observe the testing position and analyze the composition by EDS.

Spectrum	C	O	Al	K	Cl	Au	Ca	Cr	Fe	Cu	Total
1	12.77	19.38	1.54	/	0.48	12.24	2.53	30.13	11.54	9.39	100.00
2	26.66	15.31	0.64	0.41	0.31	7.49	2.20	30.53	10.11	6.33	100.00

3.According to SEM / EDS test results, the main component of foreign body is Cr oxide.

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